Humidity measurement for
Semicon Industries

Humidity measurement is critically important due to the extreme sensitivity of semiconductor manufacturing processes to moisture.

Humidity measurement in semiconductor manufacturing is not just about environmental control — it’s a key enabler of process stability, product quality, and operational safety. Accurate sensors and real-time monitoring systems are integrated throughout production sites, cleanrooms and manufacturing equipment maintain precise humidity levels and avoiding expensive defects.

Novasina provides humidity & temperature sensors with highest accuracy and reliability for any humidity levels. Sensors are easy to use and can be recalibrated or exchanged by plug and play technology.

Here are our ideal product for your climate control:

Variety of transmitters & communication options for your existing control & building automation system.

Key reasons why precise humidity control and measurement are essential:

1. Prevention of Electrostatic Discharge (ESD)

• Low humidity increases the risk of static electricity buildup.
• ESD can damage or destroy delicate semiconductor components.
• Maintaining proper relative humidity (typically 40–60%) reduces this risk.

2. Control of Contamination

• High humidity can lead to condensation, promoting particle adhesion and corrosion.
• Water vapor can carry contaminants, impacting wafer yields and reliability.
• Humidity sensors help maintain cleanroom standards (ISO 1–5) by regulating airborne moisture.

3. Photoresist Application and Lithography

• Humidity affects the performance of photoresist materials used in photolithography.
• Improper humidity can cause changes in resist thickness, adhesion, and line width control.
• Stable humidity ensures reproducibility in critical patterning steps.

4. Etching and Deposition Processes

• Many processes like plasma etching, CVD, or ALD are moisture-sensitive.
• Traces of water vapor can alter plasma characteristics or cause unwanted reactions.
• Dry environments with controlled trace moisture levels are essential.

5. Packaging and Storage of Components

• Semiconductors are highly sensitive to moisture-induced corrosion and “popcorn cracking” during reflow soldering.
• Humidity control in dry cabinets and during packaging helps maintain component integrity.

6. Process Repeatability and Yield

• Variations in humidity can introduce process variability.
• Tight control ensures higher production yields and reduced defects.